Atom Probe Tomography (APT or 3DAP for Three-Dimensional Atom Probe ) is the only material analysis technique offering extensive capabilities for both 3D imaging and chemical composition measurements at the atomic scale (around 0.1-0.3nm resolution in depth and 0.3-0.5nm laterally). Since its early developments, 3D Atom Probe has contributed to major advances in materials science.
Atom Probe Tomography (APT) has been historically successful in metals using HV pulsing mode. A few years ago, laser pulsing revolutionized the technique, allowing the analysis of semiconductors and even insulating materials.
Incorporating a new, faster, small spot UV laser, the CAMECA LEAP 4000X allows the 3D chemical mapping of many insulating materials and bulk ceramics, formerly impossible to analyze with high success rate in 3D atom probe. In addition, the small spot UV laser reduces the heating of samples and thus improves detection limits.
The CAMECA Atom Probe Tomography product line comprises the
- LA-WATAP (design and development in collaboration with the GPM - Materials Research Group - of Rouen University, France), and the
- LEAP Si and
- LEAP HR series.